Light ion sputtering of low Z materials in the temperature range 20–1100°C
J. BohdanskyMax-Planck-Institut für Plasmaphysik, EURATOM-Association, D-8046 Garching/München, Federal Republic of GermanyJ. RothMax-Planck-Institut für Plasmaphysik, EURATOM-Association, D-8046 Garching/München, Federal Republic of Germany
1984en
ABI
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Cited by 20 references