ArticleHandbook of Thin Film TechnologyL. I. Maissel·R. Glang·Paul P. Budenstein·1971·enABIABI:AkademIndex/openalex/2026.other.548983CiteAbstractNo abstract available.IdentifiersDOI10.1149/1.2408101Citations and referencesCited by 50 referencesMetrics — AkademScholar