Article

Observation of crystallite formation in ferromagnetic Mn-implanted Si

C. Awo-AffoudaUniversity at Albany-SUNY College of Nanoscale Science and Engineering, , Albany, New York 12203M. BolducUniversity at Albany-SUNY College of Nanoscale Science and Engineering, , Albany, New York 12203Mengbing HuangUniversity at Albany-SUNY College of Nanoscale Science and Engineering, , Albany, New York 12203F. Javier RamosUniversity at Albany-SUNY College of Nanoscale Science and Engineering, , Albany, New York 12203Kathleen DunnUniversity at Albany-SUNY College of Nanoscale Science and Engineering, , Albany, New York 12203B. L. ThielUniversity at Albany-SUNY College of Nanoscale Science and Engineering, , Albany, New York 12203Gabriel AgnelloUniversity at Albany-SUNY College of Nanoscale Science and Engineering, , Albany, New York 12203V. P. LaBellaUniversity at Albany-SUNY College of Nanoscale Science and Engineering, , Albany, New York 12203

2006en

ABI

Abstract

Mn-implanted Si was investigated using transmission electron microscopy to gain insight into the structure of the implanted region. Diffraction contrast images, selected area diffraction patterns, and high resolution images of the samples were acquired before and after postimplant annealing at 800°C. The images of the annealed samples revealed the formation of nanometer size precipitates distributed throughout the implanted region. Analysis of the selected area diffraction pattern determined that the most prominent lattice spacing of the crystallites is 2.15Å. This spacing indicates that the most probable phase of the crystallites is MnSi1.7 and this is consistent with the Mn:Si binary phase diagram. This phase is paramagnetic at room temperature with a Curie temperature of 47K and cannot readily account for the high Curie temperature of the material.

Identifiers

DOI: 10.1116/1.2189265

Citations and references

Cited by 20 references

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