Works cited by this work

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Work: The Mechanism of Silicon Epitaxial Layer Growth from Ion-Molecular Beams

1. Epitaxial growth of silicon assisted by ion implantation

   Tadatsugu Itoh, Tohru Nakamura

   Article19713 citations

   ABIABI:AkademIndex/openalex/2026.other.647999

2. Untitled

   Other1 citations

   ABIABI:AkademIndex/openalex/2026.other.647998

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   ABIABI:AkademIndex/openalex/2026.other.648000

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   ABIABI:AkademIndex/openalex/2026.other.648001

5. Untitled

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   ABIABI:AkademIndex/openalex/2026.other.648002