Computer simulation of the sputtering of polyatomic multilayered materials with consideration of the spatial overlapping of the collision cascades
Yu. V. TrushinA.F. Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Politekhnickeskaya St. 26, 194021 St. Petersburg, RussiaB.Ja. BerPhysico-Technical InstituteVladimir S. KharlamovA.F. Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Politekhnickeskaya St. 26, 194021 St. Petersburg, RussiaЕ. Е. ЖуркинA.F. Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Politekhnickeskaya St. 26, 194021 St. Petersburg, Russia
1996en
ABI
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Cited by 20 references