Structural characterization of TiN coatings on Si substrates irradiated with Ar ions
M. PopovićInstitute of Economic SciencesM. NovakovićVinča Institute of Nuclear Sciences, P.O. Box 522, 11001 Belgrade, SerbiaN. BibićVinča Institute of Nuclear Sciences, P.O. Box 522, 11001 Belgrade, Serbia
2009en
ABI
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Cited by 20 references