ArticleFormation of ions in sputteringZ. Sˇroubek·1989·enABIABI:AkademIndex/openalex/2026.other.650996CiteAbstractNo abstract available.IdentifiersDOI10.1016/0584-8547(89)80035-7Citations and referencesCited by 30 referencesMetrics — AkademScholar