Article

Sputtering and surface scattering at oblique ion incidence onto crystals

Е. С. МашковаInstitute of Nuclear Physics, Moscow State University , 119899, Moscow, B-234, USSRV. A. MolchanovInstitute of Nuclear Physics, Moscow State University , 119899, Moscow, B-234, USSR

1987en

ABI

Abstract

Abstract Recent experimental data on sputtering and surface scattering at oblique ion incidence onto monocrystals are presented. The data are discussed qualitatively in terms of modern concepts.

Identifiers

DOI: 10.1080/00337578708222912

Citations and references

Cited by 20 references

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