Evaporation Rate Monitor
G. R. GieddInternational Business Machines Corporation, Federal Systems Division, Kingston, New YorkMike PerkinsInternational Business Machines Corporation, Federal Systems Division, Kingston, New York
1960en
ABI
Abstract
A method for controlling the deposition rate of vacuum deposited films is described. This paper presents details of the rate sensing device and furnace control system. The control system utilizes a saturable-core reactor driven by the output of the rate monitor. This controls the furnace current, thus completing the system. Operation and calibration of the control system is described and experimental results are tabulated.
Identifiers
Citations and references
Cited by 20 references