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Article

Role of hydrogen complexes in the metastability of hydrogenated amorphous silicon

W. B. JacksonXerox Palo Alto Research Center, Palo Alto, California 94304
1990en
ABI

Abstract

A microscopic model for metastability in hydrogenated amorphous silicon (a-Si:H) involving two-hydrogen-atom complexes is proposed. Metastable-defect formation occurs when this complex dissociates creating two interstitial H atoms which form Si dangling-bond-like defects at weak-bond sites. Annealing occurs when the H atoms reform complexes.

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Citations and references

Cited by 20 references