Skip to main content
Article

Flat GaN epitaxial layers grown on Si(111) by metalorganic vapor phase epitaxy using step-graded AlGaN intermediate layers

Kai ChengESAT, Department of Electrical Engineering, Katholieke Universiteit Leuven, BelgiumMaarten LeysMCP/ART, IMEC, B-3001, Leuven, BelgiumStefan DegrooteMCP/ART, IMEC, B-3001, Leuven, BelgiumBenny Van DaeleEMAT, University of Antwerp, B-2020, Antwerp, BelgiumSteven BoeykensESAT, Department of Electrical Engineering, Katholieke Universiteit Leuven, BelgiumJoff DerluynMCP/ART, IMEC, B-3001, Leuven, BelgiumMarianne GermainMCP/ART, IMEC, B-3001, Leuven, BelgiumGustaaf Van TendelooEMAT, University of Antwerp, B-2020, Antwerp, BelgiumJan EngelenESAT, Department of Electrical Engineering, Katholieke Universiteit Leuven, BelgiumG. BorghsDepartment of Physics, Katholieke Universiteit Leuven, Belgium
2006en
ABI

Abstract

No abstract available.

Identifiers

Citations and references

Cited by 30 references