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The reaction of atomic oxygen with Si(100) and Si(111)

J. R. EngstromDepartment of Chemistry, BG-10, University of Washington, Seattle, WA 98195, USAD. J. BonserDepartment of Chemistry, BG-10, University of Washington, Seattle, WA 98195, USAMark J. NelsonDepartment of Chemistry, BG-10, University of Washington, Seattle, WA 98195, USAThomas EngelDepartment of Chemistry, BG-10, University of Washington, Seattle, WA 98195, USA
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