Статья

Investigation of an ion source intended for beam technologies

L. P. VeresovSukhumi Physicotechnical Institute, Academy of Science of Abkhaziya, Sukhumi, 384914, AbkhaziyaO. L. VeresovSukhumi Physicotechnical Institute, Academy of Science of Abkhaziya, Sukhumi, 384914, AbkhaziyaP. A. LitvinovSukhumi Physicotechnical Institute, Academy of Science of Abkhaziya, Sukhumi, 384914, Abkhaziya

Technical Physicsjournal2000en

ABI

Аннотация

An ion source with a cold cathode is described, which generates ion beams of various gases andsolids of circular cross sections for technological purposes.

Темы

Ion-surface interactions and analysis Electron and X-Ray Spectroscopy Techniques Plasma Diagnostics and Applications

Идентификаторы

DOI: 10.1134/1.1259661

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