MEASUREMENT OF SOFT X-RAY MULTILAYER MIRROR REFLECTANCE

Laser produced line plasmas were used as a broadband source of soft X rays and a stigmatic grazing incidence grating spectrometer to measure the normal incidence reflectance of concave multilayer mirrors in the 20～40 nm spectral region. The measurements of the reflectance made on a C/Al multilayer show a little lower than the calculated results and indicate a normal incidence peak reflectance of about 22% at 28.5 nm.

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