Статья

Investigation of sputtering and oxygen desorption processes by binary collision approximation method

A.A. DzhurakhalovTheoretical Department, Arifov Institute of Electronics, F. Khodjaev Str. 33, 700125 Tashkent, UzbekistanS.E. RahmatovTheoretical Department, Arifov Institute of Electronics, F. Khodjaev Str. 33, 700125 Tashkent, UzbekistanH. DreysséIPCMS—GEMME, 23, rue du Loess BP43, 67034 Strasbourg, France

Computational Materials Sciencejournal2005en

ABI

Аннотация

Аннотация отсутствует.

Темы

Ion-surface interactions and analysis Diamond and Carbon-based Materials Research Metal and Thin Film Mechanics

Идентификаторы

DOI: 10.1016/j.commatsci.2004.12.050

Цитирования и источники

Цитирований: 0Использованных источников: 15

Показатели — AkademScholar