Статья

Phase-to-phase perovskite growth transformation in thin PZT films

И. П. ПронинIoffe Physicotechnical Institite, Russian Academy of Sciences, St. Petersburg, 194021, RussiaE. Yu. KaptelovIoffe Physicotechnical Institite, Russian Academy of Sciences, St. Petersburg, 194021, RussiaС. В. СенкевичHerzen State Pedagogical University of Russia, St. Petersburg, 191168, RussiaT. A. ShaplyginaIoffe Physicotechnical Institite, Russian Academy of Sciences, St. Petersburg, 194021, RussiaV. A. KlimovIoffe Physicotechnical Institite, Russian Academy of Sciences, St. Petersburg, 194021, RussiaВ. П. ПронинHerzen State Pedagogical University of Russia, St. Petersburg, 191168, Russia

Bulletin of the Russian Academy of Sciences Physicsjournal2010en

ABI

Аннотация

The structure and dielectric properties of thin lead zirconate titanate films grown ex situ on Pt/SiO2/Si substrates were studied. It was shown that with a crystallization temperature increase in the range of 540 to 580°C, the mechanism of perovskite phase growth changes and the ferroelectric parameters change according to this transformation.

Темы

Ferroelectric and Piezoelectric Materials Microwave Dielectric Ceramics Synthesis Dielectric materials and actuators

Идентификаторы

DOI: 10.3103/s1062873810090340

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