EXPRESS ANALYSIS OF TRIETHOXYSILANE AND TETRAETHOXYSILANE USING THE RAMAN SPECTROSCOPY METHOD FOR OPTIMIZATION OF THE TECHNOLOGICAL PROCESS OF MONOSILANE SYNTHESIS

A technique for the express analysis of the products of technological processes is described, which was developed using the Raman spectroscopy method. The analysis of the Raman spectra includes the interpretation of the spectral bands, taking into account the values of the characteristic frequencies of the vibrational spectra of organic compounds, as well as the determination of the integral intensities of the corresponding spectral ranges. By example of the real time control procedure for the technological process of monosilane synthesis, the express analysis of tetraethoxysilane, which is a by-product of this technological process, is carried out. Significant advantages of using the express analysis method are demonstrated, which provide control over the normal course of the technological process and obtaining results that allow making adjustments
 to the process flow diagram in order to optimize it.

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