Статья

Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils

Xuesong LiDepartment of Mechanical Engineering and the Texas Materials Institute, 1 University Station C2200, The University of Texas at Austin, Austin, TX 78712–0292, USAWeiwei CaiDepartment of Mechanical Engineering and the Texas Materials Institute, 1 University Station C2200, The University of Texas at Austin, Austin, TX 78712–0292, USAJinho AnDepartment of Mechanical Engineering and the Texas Materials Institute, 1 University Station C2200, The University of Texas at Austin, Austin, TX 78712–0292, USASeyoung KimDepartment of Electrical and Computer Engineering, Microelectronics Research Center, The University of Texas at Austin, Austin, TX 78758, USAJunghyo NahDepartment of Electrical and Computer Engineering, Microelectronics Research Center, The University of Texas at Austin, Austin, TX 78758, USADongxing YangDepartment of Mechanical Engineering and the Texas Materials Institute, 1 University Station C2200, The University of Texas at Austin, Austin, TX 78712–0292, USARichard D. PinerDepartment of Mechanical Engineering and the Texas Materials Institute, 1 University Station C2200, The University of Texas at Austin, Austin, TX 78712–0292, USAAruna VelamakanniDepartment of Mechanical Engineering and the Texas Materials Institute, 1 University Station C2200, The University of Texas at Austin, Austin, TX 78712–0292, USAInhwa JungDepartment of Mechanical Engineering and the Texas Materials Institute, 1 University Station C2200, The University of Texas at Austin, Austin, TX 78712–0292, USAEmanuel TutucDepartment of Electrical and Computer Engineering, Microelectronics Research Center, The University of Texas at Austin, Austin, TX 78758, USASanjay K. BanerjeeDepartment of Electrical and Computer Engineering, Microelectronics Research Center, The University of Texas at Austin, Austin, TX 78758, USALuigi ColomboTexas Instruments, Dallas, TX 75243, USARodney S. RuoffDepartment of Mechanical Engineering and the Texas Materials Institute, 1 University Station C2200, The University of Texas at Austin, Austin, TX 78712–0292, USA

2009en

ABI

Аннотация

Graphene has been attracting great interest because of its distinctive band structure and physical properties. Today, graphene is limited to small sizes because it is produced mostly by exfoliating graphite. We grew large-area graphene films of the order of centimeters on copper substrates by chemical vapor deposition using methane. The films are predominantly single-layer graphene, with a small percentage (less than 5%) of the area having few layers, and are continuous across copper surface steps and grain boundaries. The low solubility of carbon in copper appears to help make this growth process self-limiting. We also developed graphene film transfer processes to arbitrary substrates, and dual-gated field-effect transistors fabricated on silicon/silicon dioxide substrates showed electron mobilities as high as 4050 square centimeters per volt per second at room temperature.

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Идентификаторы

DOI: 10.1126/science.1171245

Цитирования и источники

Цитирований: 4Использованных источников: 0

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