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Scalable Production of a Few-Layer MoS<sub>2</sub>/WS<sub>2</sub> Vertical Heterojunction Array and Its Application for Photodetectors

Yunzhou XueDepartment of Materials Science and Engineering, Monash University, Clayton, Victoria 3800, AustraliaYupeng ZhangDepartment of Materials Science and Engineering, Monash University, Clayton, Victoria 3800, AustraliaYan LiuBeijing National Laboratory for Molecular Sciences Institute of Chemistry, Chinese Academy of Sciences, Beijing 100190, People’s Republic of ChinaHongtao LiuBeijing National Laboratory for Molecular Sciences Institute of Chemistry, Chinese Academy of Sciences, Beijing 100190, People’s Republic of ChinaJingchao SongDepartment of Materials Science and Engineering, Monash University, Clayton, Victoria 3800, AustraliaJoice Sophia PonrajInstitute of Functional Nano and Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials and Devices, and Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, People’s Republic of ChinaJingying LiuDepartment of Materials Science and Engineering, Monash University, Clayton, Victoria 3800, AustraliaZai‐Quan XuDepartment of Materials Science and Engineering, Monash University, Clayton, Victoria 3800, AustraliaQingyang XuInstitute of Functional Nano and Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials and Devices, and Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, People’s Republic of ChinaZiyu WangDepartment of Materials Science and Engineering, Monash University, Clayton, Victoria 3800, AustraliaJialu ZhengDepartment of Materials Science and Engineering, Monash University, Clayton, Victoria 3800, AustraliaYunqi LiuBeijing National Laboratory for Molecular Sciences Institute of Chemistry, Chinese Academy of Sciences, Beijing 100190, People’s Republic of ChinaShaojuan LiInstitute of Functional Nano and Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials and Devices, and Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, People’s Republic of ChinaQiaoliang BaoDepartment of Materials Science and Engineering, Monash University, Clayton, Victoria 3800, Australia
2015en
ABI

Аннотация

Vertical heterojunctions of two two-dimensional (2D) transition metal dichalcogenides (TMDs) have attracted considerable attention recently. A variety of heterojunctions can be constructed by stacking different TMDs to form fundamental building blocks in different optoelectronic devices such as photodetectors, solar cells, and light-emitting diodes. However, these applications are significantly hampered by the challenges of large-scale production of van der Waals stacks of atomically thin materials. Here, we demonstrate scalable production of periodic patterns of few-layer WS2, MoS2, and their vertical heterojunction arrays by a thermal reduction sulfurization process. In this method, a two-step chemical vapor deposition approach was developed to effectively prevent the phase mixing of TMDs in an unpredicted manner, thus affording a well-defined interface between WS2 and MoS2 in the vertical dimension. As a result, large-scale, periodic arrays of few-layer WS2, MoS2, and their vertical heterojunctions can be produced with desired size and density. Photodetectors based on the as-produced MoS2/WS2 vertical heterojunction arrays were fabricated, and a high photoresponsivity of 2.3 A·W(-1) at an excitation wavelength of 450 nm was demonstrated. Flexible photodetector devices using MoS2/WS2 heterojunction arrays were also demonstrated with reasonable signal/noise ratio. The approach in this work is also applicable to other TMD materials and can open up the possibilities of producing a variety of vertical van der Waals heterojunctions in a large scale toward optoelectronic applications.

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