Comparison of microstructure and mechanical properties of chromium nitride-based coatings deposited by high power impulse magnetron sputtering and by the combined steered cathodic arc/unbalanced magnetron technique
Arutiun P. EhiasarianMaterials Research Institute, Sheffield Hallam University, Howard St, Sheffield, S1 1WB, UKP.Eh. HovsepianMaterials Research Institute, Sheffield Hallam University, Howard St, Sheffield, S1 1WB, UKLars HultmanThin Film Division, Department of Physics, IFM, Linköping University, SE-581 83 Linköping, SwedenUlf HelmerssonThin Film Division, Department of Physics, IFM, Linköping University, SE-581 83 Linköping, Sweden
2004en
ABI
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