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Environmental data and facts in the semiconductor manufacturing industry: An unexpected high water and energy consumption situation

Qi WangEnvironmental Simulation and Pollution Control State Key Joint Laboratory, State Environmental Protection Key Laboratory of Microorganism Application and Risk Control (SMARC), School of Environment, Tsinghua University, Beijing, 100084, ChinaNan HuangDepartment of Environmental Engineering, Faculty of Environment and Life, Beijing University of Technology, Beijing, 100124, ChinaZhuo ChenBeijing Laboratory for Environmental Frontier Technologies, Beijing, 100084, ChinaXiaowen ChenEnvironmental Simulation and Pollution Control State Key Joint Laboratory, State Environmental Protection Key Laboratory of Microorganism Application and Risk Control (SMARC), School of Environment, Tsinghua University, Beijing, 100084, ChinaHan-Ying CaiKey Laboratory of Microorganism Application and Risk Control of Shenzhen, Guangdong Provincial Engineering Research Center for Urban Water Recycling and Environmental Safety, Institute of Environment and Ecology, Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen, 518055, ChinaYunpeng WuKey Laboratory of Microorganism Application and Risk Control of Shenzhen, Guangdong Provincial Engineering Research Center for Urban Water Recycling and Environmental Safety, Institute of Environment and Ecology, Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen, 518055, China
2023en
ABI

Аннотация

With the expansion of the semiconductor industry, determining the huge associated water and energy consumption and accomplishing sustainable development can be key issues for this industry. This study surveyed the sustainability reports of 28 semiconductor corporations and summarized their environmental stewardship information. Overall, the total water withdrawal in 2021 was 7.89 × 108 m3, total energy consumption was 1.49 × 1011 kWh, and total greenhouse gas (GHG) emissions was 7.15 × 107 tons CO2 equivalent. The total Scope 1 and Scope 2 GHG emissions were 2.74 and 4.41 × 107 t CO2 equivalent, respectively. Surface water intake, municipal water supply, groundwater withdrawal, third party supply, and external reclaimed water intake accounted for 47.0%, 35.3%, 8.5%, 5.8%, and 3.2% of total water use, respectively. Electricity, fossil fuel, renewable energy, and others accounted for 83.7%, 12.1%, 2.7%, and 2% of the total energy use. In 2021, average water use, energy consumption, and GHG emissions were calculated to be 8.22 L/cm2, 1.15 kWh/cm2, and 0.84 kg CO2 equivalent/cm2, respectively, based on announced data. Ultrapure water consumption was predicted to be 5.51 and 0.95 × 108 m3 worldwide and for China, respectively. Effective sustainability strategies are supposed to be implemented to meet the considerable growth in water and energy consumption and GHG emissions for the semiconductor industry worldwide and in China.

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