A calibrated atomic force microscope using an orthogonal scanner and a calibrated laser interferometer
Dong‐Yeon LeeDepartment of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 373-1, Guseong-dong, Yuseong-ku, Daejeon 307-701, South KoreaDong-Min KimDepartment of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 373-1, Guseong-dong, Yuseong-ku, Daejeon 307-701, South KoreaDae‐Gab GweonDepartment of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 373-1, Guseong-dong, Yuseong-ku, Daejeon 307-701, South KoreaJin-Won ParkDivision of Optical Metrology, Korea Research Institute of Standards and Science (KRISS), Daejeon 305-340, South Korea
2006en
ABI
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