Features of the structural state and mechanical properties of ZrN and Zr(Ti)-Si-N coatings obtained by ion-plasma deposition technique

The possibility of obtaining hard nanocrystalline coatings using vacuum-arc deposition in a high-frequency discharge stimulated regime has been studied. Condensates of the Zr(Ti)-Si-N system obtained by this method contain ZrN and TiN crystalline grains. These grains exhibit a compressive strain of about −1.1% in the film growth plane, which corresponds to compressive stresses up to about 3.5 GPa in the film-substrate system. The results of nanoindentation show evidence for a strong inhomogeneity of the coatings, in which regions possessing a hardness of 29–30 GPa alternate with those where the hardness exceeds 45–47 GPa. This pattern agrees with a two-phase model based on the structural data, according to which the condensed material consists of less hard ZrN grains and harder TiN grains.

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