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Cluster beam deposition: a tool for nanoscale science and technology

Karsten WegnerParticle Technology Laboratory, Institute of Process Engineering, Department of Mechanical and Process Engineering, ETH Zurich, CH-8092 Zurich, SwitzerlandP. PiseriCIMAINA and Dipartimento di Fisica, Università di Milano, Via Celoria 16, 20133 Milano, ItalyH. Vahedi TafreshiNCRC, North Carolina State University, 2401 Research Dr., Raleigh, NC 27695-8301, USAP. MilaniCIMAINA and Dipartimento di Fisica, Università di Milano, Via Celoria 16, 20133 Milano, Italy
2006en
ABI

Аннотация

Gas phase nanoparticle production, manipulation and deposition is of primary importance for the synthesis of nanostructured materials and for the development of industrial processes based on nanotechnology. In this review we present and discuss this approach, introducing cluster sources, nanoparticle formation and growth mechanisms and the use of aerodynamic focusing methods that are coupled with supersonic expansions to obtain high intensity cluster beams with a control on nanoparticle mass and spatial distribution. The implication of this technique for the synthesis of nanostructured materials is also presented and applications are highlighted.

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