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Evolution of microstructure and related optical properties of ZnO grown by atomic layer deposition

Adib Abou ChaayaEuropean institute of membranes (IEM, ENSCM-UM2-CNRS, UMR 5635), University of Montpellier 2, Place Eugène Bataillon, F-34095, Montpellier, FranceRoman ViterFaculty of Physics, Odessa National I.I. Mechnikov University, 42, Pastera, 65026, Odessa, Ukraine,Mikhaël BechelanyEuropean institute of membranes (IEM, ENSCM-UM2-CNRS, UMR 5635), University of Montpellier 2, Place Eugne Bataillon, F-34095, Montpellier, France,Zanda AluteFaculty of Physics, Odessa National I.I. Mechnikov University, 42, Pastera, 65026, Odessa, Ukraine,Donāts ErtsInstitute of Chemical Physics, University of Latvia, 19, Raina Blvd., LV 1586, Riga, LatviaAnastasiya ZalesskayaFaculty of Physics, Odessa National I.I. Mechnikov University, 42, Pastera, 65026, Odessa, Ukraine,Kristaps KovalevskisInstitute of Atomic Physics and Spectroscopy & Institute of Chemical Physics, University of Latvia, 19, Raina Blvd., LV 1586, Riga, Latvia, andV. RouessacEuropean institute of membranes (IEM, ENSCM-UM2-CNRS, UMR 5635), University of Montpellier 2, Place Eugne Bataillon, F-34095, Montpellier, France,В. А. СмынтынаFaculty of Physics, Odessa National I.I. Mechnikov University, 42, Pastera, 65026, Odessa, Ukraine,Philippe MieleEuropean institute of membranes (IEM, ENSCM-UM2-CNRS, UMR 5635), University of Montpellier 2, Place Eugne Bataillon, F-34095, Montpellier, France,
2013en
ABI

Аннотация

A study of transmittance and photoluminescence spectra on the growth of oxygen-rich ultra-thin ZnO films prepared by atomic layer deposition is reported. The structural transition from an amorphous to a polycrystalline state is observed upon increasing the thickness. The unusual behavior of the energy gap with thickness reflected by optical properties is attributed to the improvement of the crystalline structure resulting from a decreasing concentration of point defects at the growth of grains. The spectra of UV and visible photoluminescence emissions correspond to transitions near the band-edge and defect-related transitions. Additional emissions were observed from band-tail states near the edge. A high oxygen ratio and variable optical properties could be attractive for an application of atomic layer deposition (ALD) deposited ultrathin ZnO films in optical sensors and biosensors.

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