Orientation Effects during Scattering of Ar+ Ions from the InP(001) Surface under Grazing-Angle Ion Bombardment

In the approximation of binary collisions, computer simulation of the trajectories of Ar+ ions scattered from the InP(001)〈110〉 and 〈$$\bar {1}$$10〉 surfaces have been carried out. It is shown that the trajectories of the ions scattered from the surface of a binary single crystal are mainly determined by crystallographic directions that have a significant effect on the processes of scattering and neutralization of ions. The energy and angular distributions of small-angle scattering of Ar+ ions with Е0 = 3 keV from the surface of an InP(001) single crystal are calculated. It is established that the contribution of the near-surface region to ion scattering, which gives rise to the appearance of several discrete peaks in the low-energy part of the spectrum, can be clearly distinguished in the energy distribution.

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