Comparison of tribological behavior of three films—TiN, TiCN and CrN—grown by physical vapor deposition
Y.L. SuDepartment of Mechanical Engineering, National Chen-Kung University, Tainan 70101, TaiwanShuhuai YaoDepartment of Mechanical Engineering, National Chen-Kung University, Tainan 70101, TaiwanZ.L. LeuDepartment of Mechanical Engineering, National Chen-Kung University, Tainan 70101, TaiwanC.S. WeiDepartment of Mechanical Engineering, National Chen-Kung University, Tainan 70101, TaiwanC.T. WuMetal Industries Research and Development Center, Kaoshiung, Taiwan
1997en
ABI
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