Статья

Highly Sensitive and Selective MEMS Gas Sensor Based on WO3/Al2O3/Graphite for 2-Chloroethyl Ethyl Sulfide (2-CEES) Detection

Liangpan YangInformation Materials and Intelligent Sensing Laboratory of Anhui Province & Industry-Education-Research Institute of Advanced Materials and Technology for Integrated Circuits, Anhui University, Hefei 230601, ChinaWangze ChengInformation Materials and Intelligent Sensing Laboratory of Anhui Province & Industry-Education-Research Institute of Advanced Materials and Technology for Integrated Circuits, Anhui University, Hefei 230601, ChinaWenlong YanInformation Materials and Intelligent Sensing Laboratory of Anhui Province & Industry-Education-Research Institute of Advanced Materials and Technology for Integrated Circuits, Anhui University, Hefei 230601, ChinaWen LiCenter for Nanoscale Characterization & Devices (CNCD), School of Physics and Wuhan National Laboratory for Optoelectronics (WNLO), Huazhong University of Science and Technology (HUST), Wuhan 430074, ChinaChangyue XiaEast China Institute of Photo-Electron ICs, Suzhou 215163, ChinaChuang SunEast China Institute of Photo-Electron ICs, Suzhou 215163, ChinaDoumeng HuInformation Materials and Intelligent Sensing Laboratory of Anhui Province & Industry-Education-Research Institute of Advanced Materials and Technology for Integrated Circuits, Anhui University, Hefei 230601, ChinaYunong ZhaoInformation Materials and Intelligent Sensing Laboratory of Anhui Province & Industry-Education-Research Institute of Advanced Materials and Technology for Integrated Circuits, Anhui University, Hefei 230601, ChinaXiaohui GuoEast China Institute of Photo-Electron ICs, Suzhou 215163, ChinaWei ZengEast China Institute of Photo-Electron ICs, Suzhou 215163, ChinaSiliang WangEast China Institute of Photo-Electron ICs, Suzhou 215163, China

2023en

ABI

Аннотация

The detection and monitoring of toxic and harmful gases play a vital role in environmental protection, human health, and industrial and agricultural production. However, it is still challenging to develop gas sensors for the detection of toxic and harmful gases with high sensitivity, good recovery and excellent selectivity. In this study, WO3/Al2O3/graphite composite materials were used for an MEMS 2-CEES gas sensor (dichlorodiethyl sulfide simulation), and the corresponding sensing properties were explored. The experimental results show that when the working temperature is 340 °C, the response of the sensor to 2-CEES gas with a concentration of 5.70 ppm is 69%, the response time is 5 s and the recovery time is 42 s. The sensor also has the advantages of long-term stability and high selectivity. Furthermore, the MEMS gas sensor array based on WO3/Al2O3/graphite composite materials has been achieved and also exhibits excellent sensing performance. Overall, this study provides a strategy for realizing high-performance dichlorodiethyl sulfide gas sensors.

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Идентификаторы

DOI: 10.3390/chemosensors12010005

Цитирования и источники

Цитирований: 2Использованных источников: 0

Показатели — AkademScholar