Lift‐Off PMN–PT Thick Film for High‐Frequency Ultrasonic Biomicroscopy
Benpeng ZhuDepartment of Electronic Science and Technology, Huazhong University of Science and Technology, Wuhan 430074, ChinaJiangxue HanDepartment of Biomedical Engineering, NIH Transducer Resource Center, University of Southern California,Los Angeles, California 90089-1111Jing ShiKey Laboratory of Acoustic and Photonic Materials and Devices of Ministry of Education, Department of Physics, Wuhan University, Wuhan 430072, ChinaKoping Krik ShungDepartment of Biomedical Engineering, NIH Transducer Resource Center, University of Southern California,Los Angeles, California 90089-1111Qing WeiChemat Technology Inc., Northridge, California 91324Yuhong HuangChemat Technology Inc., Northridge, California 91324Marija KosecJozef Stefan Institute, SI-1000 Ljubljana, SloveniaQifa ZhouDepartment of Biomedical Engineering, NIH Transducer Resource Center, University of Southern California,Los Angeles, California 90089-1111
2010en
ABI
Аннотация
Piezoelectric 0.65Pb(Mg(1/3)Nb(2/3))O(3)-0.35PbTiO(3) (PMN-35PT) thick film with a thickness of approximately 12 µm has been deposited on the platinum buffered Si substrate via a sol-gel composite method. The separation of the film from the substrate was achieved using a wet chemical method. The lifted-off PMN-35PT thick film exhibited good dielectric and ferroelectric properties. At 1 kHz, the dielectric constant and the dielectric loss were 3,326 and 0.037, respectively, while the remnant polarization was 30.0 µC/cm(2). A high frequency single element acoustic transducer fabricated with this film showed a bandwidth at -6 dB of 63.6% at 110 MHz.
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