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Ion microprobe for studying cluster ion decay reactions

A. D. BekkermanArifov Institute of Electronics, Uzbek Academy of Sciences, Academgorodok, Tashkent 700143, USSRН. Х. ДжемилевArifov Institute of Electronics, Uzbek Academy of Sciences, Academgorodok, Tashkent 700143, USSRV. M. RotsteinArifov Institute of Electronics, Uzbek Academy of Sciences, Academgorodok, Tashkent 700143, USSR
1990en
ABI

Аннотация

Abstract In the present paper, an ion microprobe is used to study the fragmentation regularities of Al n + and Si n + cluster ions sputtered under ion bombardment. The results have shown that the ions formed during cluster fragmentation, along the path from the target to the detector, transform the mass spectra of both charged and neutral components and the energy distribution of the parent cluster and monomer ions.

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