Статья

Boron diffusion into 6H-SiC through graphite mask

Stanislav I. SolovievDepartment of Electrical Engineering, University of South Carolina, 29208, Columbia, SCYing GaoDepartment of Electrical Engineering, University of South Carolina, 29208, Columbia, SCX. WangDepartment of Electrical Engineering, University of South Carolina, 29208, Columbia, SCT. S. SudarshanDepartment of Electrical Engineering, University of South Carolina, 29208, Columbia, SC

2001en

ABI

Аннотация

Аннотация отсутствует.

Идентификаторы

DOI: 10.1007/s11664-001-0020-4

Цитирования и источники

Цитирований: 2Использованных источников: 0

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