MOSFET scaling: Impact of two-dimensional channel materials

The scaling behavior of MOSFETs based on two-dimensional (2D) materials is investigated by means of numerical simulation and analytical modeling. Due to their ultimate thinness, 2D channel materials like MoS <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> are perfectly suited to push the scaling limits beyond those of silicon. The electrostatic integrity of 2D transistors is governed by the chosen device architecture, substrate material, and gate dielectric, and, despite 2D materials are ultimately thin, by the dielectric properties of the channel. Regarding on-state performance, 2D materials with moderate transport properties like MoS <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> become competitive at channel lengths around 5 nm, due to the degraded mobility in thin Si bodies.

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