Submicrometer digital in-line holographic microscopy at 32 nm with high-order harmonics
A. S. MorlensLaboratoire d'Optique Appliquée, Ecole Nationale Supérieure de Techniques Avancées, Ecole Polytechnique, CNRS UMR7639, Chemin de la Hunière, F-91761 Palaiseau Cedex, France. [email protected]J. GautierEcole PolytechniqueG. ReyEcole PolytechniquePhilippe ZeitounEcole PolytechniqueJean-Pascal CaumesCentre d'Etudes de SaclayMarylène Kos-RossetCentre d'Etudes de SaclayH. MerdjiCentre d'Etudes de SaclayS. KazamiasUniversité Paris SudK. CassouUniversité Paris SudM. FajardoInstituto Superior Técnico
2006en
ABI
Аннотация
Soft-x-ray digital in-line microscopic holography is achieved using a fully coherent high-order harmonic source emitting at 32 nm. Combination of commercial-grade soft-x-ray optics and a back-illuminated CCD detector allows a compact and versatile holographic setup. Different experimental geometries have been tested by imaging calibrated 50 nm tips and 1 microm wires. Spatial resolution of 800 nm is measured with magnifications ranging from 30 to 110 and a numerical aperture around 0.01. Finally, the potentiality of three-dimensional numerical reconstruction from a single hologram acquisition is shown experimentally.
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