Control of charge transport mode in the Schottky barrier by δ-doping: Calculation and experiment for Al/GaAs

The possibility of controlling the effective barrier height in Schottky diodes by introducing a δ-doped layer near the metal-semiconductor contact is considered. A decrease in the effective barrier height is caused by the increased role of carrier tunneling through the barrier. A complete quantum-mechanical numerical simulation of the effect of the δ-layer parameters (concentration and depth) on the current-voltage characteristics of modified diodes was carried out for the Schottky barrier contacts to n-GaAs. The simulation results were found to fit well the experimental characteristics of diodes produced by metal-organic chemical vapor epitaxy. The studies carried out made it possible to choose the optimal δ-layer parameters to produce low-barrier (about 0.2 eV) diodes with a reasonable nonideality factor (n≤1.5). Such structures can be employed to fabricate microwave detector diodes without bias.

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