Atomic excitations in sputtering processes

Abstract The sputtering of Mg, Cu, Zn, Cia, Au, and TI by Xe+ impact has been studied by optical spectrometry in a 10−9 Torr vacuum. The excitation functions are compared with total sputtering yields. The relative level populations of the sputtered particles follow an (n*)p behavior, almost identical to that for gas single collisions and beam-foil excitations, whereas two intensity distributions based on local thermodynamic equilibrium are shown not to be satisfied.

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