Hard a-Si<sub>3</sub>N<sub>4</sub>/MeN<sub>x</sub> Nanocomposite Coatings with High Thermal Stability and High Oxidation Resistance

This article reports on a new class of amorphous a-Si3N4/MeNx nanocomposite coatings with a high (≥50 vol.%) content of Si3N4 phase; here Me=Zr, Ta, Mo and W. These nanocomposites exhibit high (>1000°C) thermal stability against crystallization and high (>1000 °C) oxidation resistance if the metal Me incorporated in the nanocomposite is correctly selected. It was found that the Zr-Si-N film deposited on Si(100) substrate exhibits no increase of the mass (m=0) in thermogravimetric measurements performed in flowing air up to 1300 °C, i.e. up to the temperature that is the thermal limit for Si substrate but not for nanocomposite.

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