Defects in silicon

The method of obtaining pure polycrystalline silicon is described, followed by short accounts of how this material is converted into single-crystal form either by the Czochralski (CZ) pulling method or the float-zone (FZ) method. It is shown that the silicon contains various impurities including oxygen, carbon, boron and possibly hydrogen. The defects and impurities often show a nonhomogeneous distribution in the form of helical swirls. Heat treatment of silicon-containing oxygen leads to the clustering of this impurity. At 450 degrees C there is formation of small complexes that act as shallow donors. Investigations using IR and ESR spectroscopy have so far failed to determine the atomic configuration of the defects. Heating at higher temperatures causes wide-scale precipitation of oxygen. There are interactions with carbon and there can be formation of silicon carbide precipitates. Contamination from Cu, Au, Fe, etc., can occur during these treatments and methods for gettering these metals are discussed, involving dislocations and silica precipitates. Low-temperature irradiations produce vacancies and self-interstitials which combine with impurities to form complexes on heating from 4K to 300K. Evidence is presented to illustrate the possible charge states of self-interstitials. Damage produced by fast neutrons is discussed next, followed by a brief account of neutron transmutation doping whereby neutrally occurring 30Si is converted to 31P by the capture of thermal neutrons. Some aspects of high-temperature diffusion are discussed and attempts are made to correlate the data with that derived from the irradiation studies.

Перевод пока недоступен