Статья

Far-field femtosecond laser-driven λ/73 super-resolution fabrication of 2D van der Waals NbOI2 nanostructures in ambient air

Yanchao GuanKey Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education, Harbin Institute of Technology, Harbin, ChinaYe DingKey Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education, Harbin Institute of Technology, Harbin, ChinaYuqiang FangSchool of Materials Science and Engineering, Shanghai Jiao Tong University, Shanghai, China. [email protected]Jingyi LiSchool of Mechatronics Engineering, Harbin Institute of Technology, Harbin, ChinaYanan LiuZhengzhou Research Institute, Harbin Institute of Technology, Zhengzhou, ChinaRui WangKey Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education, Harbin Institute of Technology, Harbin, ChinaJuanyuan HaoSchool of Materials Science and Engineering, Harbin Institute of Technology, Harbin, ChinaHui XieSchool of Mechatronics Engineering, Harbin Institute of Technology, Harbin, ChinaCheng‐Yan XuSauvage Laboratory for Smart Materials, School of Materials Science and Engineering, Harbin Institute of Technology (Shenzhen), Shenzhen, ChinaLiang ZhenSauvage Laboratory for Smart Materials, School of Materials Science and Engineering, Harbin Institute of Technology (Shenzhen), Shenzhen, ChinaYang LiKey Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education, Harbin Institute of Technology, Harbin, China. [email protected]Lijun YangKey Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education, Harbin Institute of Technology, Harbin, China. [email protected]

2025en

ABI

Аннотация

The design and fabrication of ultrafine nanostructures in two-dimensional (2D) van der Waals materials are crucial for the functionalization of electronic devices. Here, we report the utilization of far-field femtosecond laser patterning to fabricate super-resolution nano-groove array (NGA) structures in 2D multilayer NbOI2 in ambient air, achieving groove widths as low as ~14.5 nm (~λ/73). The NGA structures maintain a well-defined single-crystal NbOI2 with amorphous Nb2O5 edges as narrow as 3.2 nm. The formation mechanism of NGA structure is confirmed to be associated with the coupled field of surface plasmon polariton periodic field and nano-groove-induced local near-field induced by femtosecond laser irradiation. Furthermore, the NGA-NbOI2 gas sensor exhibits NO2 sensing performance, with a rapid response time (5.1 s), which is attributed to the existence of abundant NbOI2-Nb2O5 heterojunctions. This approach will propel the further development of nano-lithography techniques for functional device applications of 2D materials. This work presents a far-field femtosecond laser patterning method to fabricate super-resolution nano-groove array structures in 2D multilayer NbOI2 in ambient air, with groove widths as low as ~14.5 nm ( ~ λ/73).

Перевод пока недоступен

Идентификаторы

DOI: 10.1038/s41467-025-59520-9

Цитирования и источники

Цитирований: 2Использованных источников: 0

Показатели — AkademScholar