V. I. Belyĭ

1 та иш

Institute of Inorganic Chemistry, 3 Science Avenue, Novosibirsk 630090, U.S.S.R

1. Hydrogen determination in silicon nitride films by the nuclear recoil method

   И. П. Чернов, V. N. Shadrin, Ju.P. Cherdantsev +4

   МақолаSilicon and Solar Cell TechnologiesThin Solid Films19820 иқтибос

   ABIABI:AkademIndex/openalex/1982.article.000014