A. I. Voroshilo

1 та иш

National Academy of Sciences of Ukraine, Applied Physics Institute, Sumy, Ukraine

1. Influence of relativistic and quantum effects on the blur in projection lithography systems

   S. P. Roshchupkin, V.E. Storizhko, О.И. Денисенко +4

   МақолаLaser-Matter Interactions and Applications20040 иқтибос

   ABIABI:AkademIndex/openalex/2004.article.000303