Effect of the boundaries between DLC and C2N domains on the conductivity of CN x films
I.Sh. TrakhtenbergInstitute of Metal Physics, Ural Division, Russian Academy of Sciences, ul. S. Kovalevskoi 18, Ekaterinburg, 620041, RussiaA.B. VladimirovInstitute of Metal Physics, Ural Division, Russian Academy of Sciences, ul. S. Kovalevskoi 18, Ekaterinburg, 620041, RussiaA.P. RubshteinInstitute of Metal Physics, Ural Division, Russian Academy of Sciences, ul. S. Kovalevskoi 18, Ekaterinburg, 620041, RussiaA. V. GapontsevInstitute of Metal Physics, Ural Division, Russian Academy of Sciences, ul. S. Kovalevskoi 18, Ekaterinburg, 620041, RussiaV. V. Kondrat’evRussian Academy of SciencesБ. А. ЛогиновMoscow State Institute of Electronic Engineering, pr. 4806, d. 5, Zelenograd, Moscow, 124498, RussiaP. B. LoginovMoscow Physicotechnical Institute, Institutskii per. 9, Dolgoprudnyi, Moscow oblast, 141700, Russia
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Аннотация
CN0 ≤ x ≤ 0.5 coatings 1–2 μm thick have been obtained using arc pulse vacuum deposition of graphite doped with nitrogen which is introduced into the working chamber to pressures of 5 Pa. The measurements of their density and electrical resistance confirm the model of a composite DLC-C2N structure. The pattern of the surface of the condensates and the micromap of the electrical conductivity of the same regions of the surface confirm the high conductivity of the boundaries between the DLC and C2N submicron components.
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