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Effects of modulation period on microstructure, mechanical properties of TiBN/TiN nanomultilayered films deposited by multi arc ion plating

Shangru ZhouKey Laboratory of Artificial Micro- and Nano-Materials of Ministry of Education and School of Physics and Technology, Wuhan University, 430072 Wuhan, ChinaVasiliy PelenovichInstitute of Ion-Plasma and Laser Technologies, Academy of Sciences of Uzbekistan, 700135 Tashkent, UzbekistanBo HanKey Laboratory of Artificial Micro- and Nano-Materials of Ministry of Education and School of Physics and Technology, Wuhan University, 430072 Wuhan, ChinaMuhammad Imran YousafKey Laboratory of Artificial Micro- and Nano-Materials of Ministry of Education and School of Physics and Technology, Wuhan University, 430072 Wuhan, ChinaSuding YanKey Laboratory of Artificial Micro- and Nano-Materials of Ministry of Education and School of Physics and Technology, Wuhan University, 430072 Wuhan, ChinaC.X. TianKey Laboratory of Artificial Micro- and Nano-Materials of Ministry of Education and School of Physics and Technology, Wuhan University, 430072 Wuhan, ChinaDejun FuKey Laboratory of Artificial Micro- and Nano-Materials of Ministry of Education and School of Physics and Technology, Wuhan University, 430072 Wuhan, China
Vacuumjournal2016en
ABI

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