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What [plasma used for growing] diamond can shine like flame?

Michael N. R. AshfoldBristolEdward J. D. MahoneyBristolSohail MushtaqBristolBenjamin S. TruscottBristolYu. A. MankelevichLomonosov Moscow State University
Chemical Communicationsjournal2017en
ABI

Аннотация

Diamond synthesis by chemical vapour deposition (CVD) from carbon-containing gas mixtures has by now long been an industrial reality, but commercial interest and investment into the technology has grown dramatically in the last several years. This Feature Article surveys recent advances in our understanding of the gas-phase chemistry of microwave-activated methane/hydrogen plasmas used for diamond CVD, including that of added boron-, nitrogen- and oxygen-containing dopant species. We conclude by considering some of the remaining challenges in this important area of contemporary materials science.

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