Мақола

A Program for Calculating the Projective Range and Straggling of Ions in a Solidusing the Approximation of V.V. Yudin

Sharifa B. UtamuradovaInstitute of Semiconductor Physics and Microelectronics at the National University of Uzbekistan named after Mirzo UlugbekР. А. МуминовPhysical-Technical Institute of the Scientific-Production Association “Physics-Sun” of the Academy of Sciences of the Republic of UzbekistanВ. Г. ДыскинInstitute of Material Science of the Scientific-Production Association “Physics-Sun” of the Academy of Sciences of the Republic of UzbekistanО. Ф. ТукфатуллинInstitute of Semiconductor Physics and Microelectronics at the National University of Uzbekistan named after Mirzo Ulugbek

Computational nanotechnologyjournal2022en

ABI

Аннотация

Ion implantation is the basis of many technological processes in electronics and microelectronics. The main quantities characterizing the penetration of ions into a solid are as follows; the length of the path of the ion until it stops completely, the average value of the projection of the total path on the direction of motion R̅p, and the average normal deviation of the projection of the path ΔR̅p. To calculate these values, computer programs SRIM, TRIM, and DYNE have been created, which require installation on a personal computer and occupy a large amount of hard disk space, which is not always justified in engineering practice. This paper describes an algorithm for a simple, installation-free program for calculating R̅p and ΔR̅p. The program algorithm is based on the Lindhard-Scharff-Schiott theory.

Ҳали таржима қилинмаган

Мавзулар

Aerospace, Electronics, Mathematical Modeling Ion-surface interactions and analysis

Идентификаторлар

DOI: 10.33693/2313-223x-2022-9-4-11-16

Иқтибослар ва манбалар

0 та иқтибос6 та фойдаланилган манба

Кўрсаткичлар — AkademScholar · Тез орада