Определение растворимости кобальта в монокристаллическом кремнии методом нейтронно-активационного анализа

Abstract. The possibility of instrumental neutron activation analysis is revealed for determining the solubility of cobalt in single-crystal silicon. It was shown that in n-Si in the diffusion temperature range of 1000  1250 0С the total solubility of the 60Co impurity varies within the concentration range of 2.8 ∙ 1014  9 ∙ 1015 cm-3, and the electrically active concentration grows from 1013 to 3 ∙ 1014 cm-3. In order to reduce the error in determining the concentration of 60Co in doped Si samples, it is suggested to use the parent stable isotope rather than the daughter cobalt radionuclide.

Ҳали таржима қилинмаган