Mathematical Modeling of the Process Scattering Ions from Atomic Chain of the Al₂O₃(001)<110> Surface

The first results of studying the trajectory of scattered particles from the Al<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>O<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf>(001)< 110> surface using the weak collision approximation (BCA) method are presented in this paper. It is shown that the method BCA is changeable at small angles of incidence and at low energies. There are given information about calculation of the ion trajectory in open parallel half-channels formed on the faces (110) and (100) of a cubic face-centered single crystal. In order to consider all possible ion trajectories associated with the initial aiming points, we select an elementary square area on the face (100) with sides parallel to the axis (110) and perpendicular to it. For study trajectory scattered ions was chosen some aiming points on the atomic row of the surface. With an increase in the aiming point, deviations of the trajectory from the initial position are observed. Theoretically, it is possible to calculate the value of the aiming point, which is observed by the scattering of particles from the atomic row of the surface. We also calculated the coefficient of collision of scattered ions from the atomic row of the surface Al<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>O<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf>(001)<110>.

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