Morphology and Optical Characteristics of TiO2 Nanofilms Grown by Atomic-Layer Deposition on a Macroporous Silicon Substrate
T. K. TurdalievU. A. Arifov Institute of Ion Plasma and Laser Technologies, Academy of Sciences of the Republic of Uzbekistan, Tashkent, UzbekistanХ. Б. АшуровU. A. Arifov Institute of Ion Plasma and Laser Technologies, Academy of Sciences of the Republic of Uzbekistan, Tashkent, UzbekistanР. Х. АшуровU. A. Arifov Institute of Ion Plasma and Laser Technologies, Academy of Sciences of the Republic of Uzbekistan, Tashkent, Uzbekistan
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