Synthesis of multiwalled carbon nanotubes by thermal CVD technique on Ni catalyst

In this work, carbon nanotubes were synthesized using the catalytic thermal chemical vapordeposition (CVD) method. A thin layer of Ni catalyst was deposited onto a Si substrate with aSiO2 buffer layer using the electron beam evaporation technique. The formation of Ni nanoparticleson the Ni/SiO2/Si sample under a hydrogen atmosphere and elevated temperatures wasinvestigated. The morphology of the nickel nanoparticles, as well as the morphology, phasestate, and quality of the synthesized carbon nanomaterial, were characterized using scanningelectron microscopy (SEM), Raman spectroscopy, and X-ray diffraction (XRD) analyses. Asthe temperature increased, Ni nanoparticles on the SiO2 buffer layer exhibited agglomeration,leading to a decrease in particle density and an increase in their size. The synthesized carbonnanomaterial was found to consist of multi-walled carbon nanotubes (MWCNTs), showingstructural defects and a significant amount of amorphous carbon.

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