Structural and vibrational characterization of Si ₃ N ₄ nanopowders under electron beam irradiation

Abstract The structural and vibrational properties of Si 3 N 4 nanopowders were investigated before and after electron irradiation at fluences of 1 × 10 15 , 5 × 10 15 , and 1 × 10 16 e cm −2 . X-ray diffraction analysis revealed that the material retains its biphasic nature ( α - and β -Si 3 N 4 ) after irradiation, although changes in phase fractions and lattice parameters were observed. Fourier-transform infrared spectroscopy (400–1300 cm −1 ) showed shifts in peak positions and variations in intensities, indicating bond rearrangements and modifications in the local Si–N and Si–O environment. Raman spectroscopy further confirmed irradiation-induced structural changes through systematic peak shifts and spectral modifications. The results demonstrate that electron irradiation significantly affects the local structure and defect formation in Si 3 N 4 nanopowders while preserving the overall crystalline phases.

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