Sputter Deposition Processes
Diederik DeplaDepartment of Solid State Sciences, Ghent University, BelgiumStijn MahieuDepartment of Solid State Sciences, Ghent University, BelgiumJ. E. GreeneMaterials Science and Physics Departments and the Frederick Seitz Materials Research Laboratory, University of Illinois, Urbana, Illinois, USA
2009en
ABI
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